Figure 2.

Fabrication of the hybrid optoplasmonic structure: (a) deposition of 200 nm TiO₂ layer onto the glass substrate by electron beam physical vapor deposition. (b) Spin-coating of negative photoresist and LIL using a He–Cd laser. (c) Formation of a GMR structure with a 520 nm periodic photoresist grating. Focused ion beam (FIB) cut reveals grating channels in a magnified view. (d) Directed self-assembly of gold NPs (88 nm in diameter) by the controlled evaporation of particle dispersion (convective self-assembly). An SEM image of the final structure with a magnified view in the inset shows dimer particle chain arrangement within grating channels. (e) Photograph of the fabricated sample on an optical table. Different first-order diffracted wavelengths (colors) at various AOIs appear on reflections from ordinary white room-light source.