Figure 20.
Cross-section of 500 µm deep micro-holes without orbiting; with 5 µm orbit radius; and with 7.5 µm orbit radius drilled with 60 V and 47 pF capacitance [182].
Cross-section of 500 µm deep micro-holes without orbiting; with 5 µm orbit radius; and with 7.5 µm orbit radius drilled with 60 V and 47 pF capacitance [182].