Table 1.

Deposition conditions, Ge concentration, and film roughness (Ra) for germanium-doped diamond-like carbon (Ge-DLC) films prepared by double pulsed laser deposition (PLD) arrangement. Film thickness—cca 160 nm. Laser 1—energy density 8 J cm⁻², spot size 2 × 1 mm². Laser 2—energy density 1.5 J cm⁻², spot size 4 × 1.5 mm². WDS—wavelength dependent X-ray spectroscopy.

Sample No.	Laser 1—Compex (Graphite Target)		Laser 2—Lumonics (Ge Target)		Ge in DLC (WDS) [at.%]	Roughness Ra [nm]
	No. of Pulses	Rep. Rate [Hz]	No. of Pulses	Rep. Rate [Hz]
5	21,685	14	29,429	19	12	120.1
6	29,083	30	17,450	18	9	83.6
7	31,891	27	12,992	11	5	63.6
8	36,216	30	6036	5	2.5	61.7
9	38,680	37	2091	2	1	14.4
10	40,000	30	-	-	0	2.8