Table 1.
Acquisition settings.
| Setting | FLT1-7 | QTFU2-10 | Roughness standard | |
|---|---|---|---|---|
| Microscope | Manufacturer | Carl Zeiss Microscopy GmbH | ||
| Model | Axio Imager.Z2 Vario + LSM 800 MAT | |||
| Location | Laboratory | TraCEr laboratory, MONREPOS, Germany | ||
| Floor | −1 (basement) | |||
| Anti-vibration table | Passive | |||
| Acquisition | Software | ZEN blue 2.3 with Shuttle&Find module | ||
| Mode | LSM (laser scanning confocal microscopy) | |||
| Objective | Manufacturer | Carl Zeiss Microscopy GmbH | ||
| Objective 1 | EC Epiplan 50×/NA = 0.75/WD = 1 mm | |||
| Objective 2 | C Epiplan-Apochromat 50×/NA = 0.95/WD = 0.22 mm | |||
| Illumination | Source | Laser | ||
| Wavelength | 405 nm | |||
| Intensity | 4% | |||
| Settings | Scanning direction | Both ways (no correction, line step = 1) | ||
| Scanning speed | 8 (max) | |||
| Bit depth | 16 bits | |||
| Master Gain | 260 V | 195 V | ||
| Pinhole diameter objective 1 | 73 µm (=1 AU lateral optical resolution) | |||
| Pinhole diameter objective 2 | 54 µm (=1 AU lateral optical resolution) | |||
| Size and resolution | Zoom | 0.5× | ||
| Field of view | 255.56 × 255.56 µm | 945.62 × 255.56 μm (4 × 1 tiles) | ||
| Frame size | 3000 × 3000 pixels | 7578 × 2048 pixels | ||
| X/Y pixel size | 0.0852 µm | 0.125 µm | ||
| Step size | 0.25 µm | |||
| Data quality | No noise cut (0–65335 levels, post-processing) | |||
| Measurement conditions | Duration | ≈5–10 min | ≈15–20 min | ≈5–6 min |
| Vertical (z) measuring range | 20–37 µm | 60–82 µm | 10 µm | |
| Temperature | 25.4 to 26.2 ± 0.5 °C | 24.5 to 26.1 ± 0.5 °C | 25.1 to 26.4 ± 0.5 °C | |
| Relative humidity | 46.2 to 55.2 ± 3%rH | 51.9 to 54.9 ± 3%rH | 48.5 to 53.6 ± 3%rH | |
AU = Airy Unit, NA = numerical aperture, WD = working distance.