Table 2.

Summary of the redeposition ratios and rates for Ti, Pt, and Si during ion beam etching using Ar⁺ ions

Material	Thickness [nm]		Redeposition ratio [%]	Etching rate [nm/min]	Redeposition rate [nm/min]
	On substrate	On wall
Ti	80	33.3	41.6	35.5	14.8
Pt	115	36.6	31.8	92	29.3
Si	110	40	36.3	73.3	26.7