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Plasma-enhanced atomic layer deposition (PEALD) of Al2O3 on ReS2. (a) The evolution of (a) Re 4f and S 2p core level spectra, (b) Ex-situ AFM image and line profile recorded following 80 cycles PEALD of Al2O3, (c) Al 2p and O 1s core level spectra up to 80 cycles of Al2O3, and (d) Raman spectra recorded on exfoliated ReS2 and after 80 cycles of PEALD of Al2O3.
