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Deposition of Al2O3 using thermal ALD on functionalized ReS2 surface by UV-Ozone exposure. (a) The evolution of Re 4f and S 2p core level spectra, (b) Ex-situ AFM image and line profile recorded following 80 cycles PEALD of Al2O3, (c) Al 2p and O 1s core level spectra up to 80 cycles of Al2O3, and (d) Raman spectra from exfoliated ReS2 and after 80 cycles of Al2O3 on UV-Ozone treated ReS2.
