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. 2019 May 2;9:6806. doi: 10.1038/s41598-019-43340-1

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Nanostraw membrane fabrication. (a) Two steps for the nanostraw fabrication: (1) electroless Au plating to track-etched polycarbonate (TEPC) membrane and (2) etching of top surface. (b–d) Optical images of 8-mm-diameter samples at different stages of nanostraw fabrication. TEPC membrane included size-controlled pores. In our experiments, 0.4-, 0.6-, and 1.0-μm-diameter pores were used. (b) Images of the original TEPC membrane facing up and down. (c) Au is plated on the TEPC membrane surfaces as well as the pore surfaces. (d) Top surface of Au membrane was etched by two steps: (1) Au surface etching with aqua regia, including nitric acid and hydrochloric acid, and (2) PC surface etching with O₂ RIE. (e–h) The Au/TEPC nanostraws after RIE at 0 (e), 10 (f), 20 (g), and 30 min (h).