Fig. 4.

True 3D eight-layered microchip fabricated by hybrid “all-in-one” femtosecond laser processing. a and b Schematic illustrations of the fabrication process of eight-layered glass microchannels by combing FLAE of glass and TPP. First, four-layered 3D glass microchannels were fabricated by FLAE on the front side of the glass (+Z surface) with optimized parameters. Then, we turned over the sample to continue fabricating other four-layered microchannels on the opposite side (−Z surface) with the identical processing parameters and symmetric scanning strategy. c Integration of different polymer characters of “1”, “2”, “3”, “4”, “5”, “6”, “7”, and “8” in each of the eight layers. Scale bars: 200 μm