U11	U22	U33	U12	U13	U23
Cu1	0.0292 (2)	0.0192 (2)	0.0325 (2)	−0.00422 (17)	0.00912 (17)	−0.00224 (18)
Cl2	0.0445 (5)	0.0387 (5)	0.0368 (5)	−0.0036 (4)	0.0122 (4)	−0.0021 (4)
Cl1	0.0441 (5)	0.0221 (4)	0.0698 (7)	−0.0053 (4)	0.0219 (5)	−0.0113 (4)
N21	0.0282 (15)	0.0246 (15)	0.0307 (16)	−0.0030 (12)	0.0062 (12)	−0.0021 (12)
N1	0.0239 (14)	0.0234 (14)	0.0240 (14)	0.0002 (11)	0.0038 (11)	0.0010 (11)
N31	0.0260 (15)	0.0310 (16)	0.0329 (16)	−0.0058 (12)	0.0058 (12)	−0.0013 (13)
N23	0.0258 (14)	0.0281 (15)	0.0350 (16)	0.0026 (12)	0.0077 (12)	0.0080 (13)
N11	0.0320 (16)	0.0256 (15)	0.0397 (17)	0.0030 (13)	0.0041 (13)	0.0037 (14)
N33	0.0213 (15)	0.0458 (19)	0.0336 (17)	−0.0043 (13)	0.0073 (12)	0.0035 (15)
N13	0.0349 (17)	0.0458 (19)	0.0278 (16)	−0.0012 (14)	0.0028 (13)	0.0076 (14)
N4	0.0322 (16)	0.0355 (17)	0.0328 (16)	0.0020 (13)	0.0090 (13)	−0.0078 (14)
C12	0.0237 (17)	0.0317 (19)	0.0296 (19)	−0.0019 (14)	0.0034 (14)	0.0039 (15)
C26	0.0322 (19)	0.0334 (19)	0.0302 (19)	−0.0010 (15)	0.0036 (15)	−0.0064 (16)
C22	0.0238 (16)	0.0204 (16)	0.0279 (17)	−0.0002 (13)	0.0024 (13)	0.0020 (13)
C5	0.0280 (17)	0.0263 (18)	0.0256 (17)	−0.0013 (14)	0.0016 (14)	−0.0033 (14)
C32	0.0244 (17)	0.038 (2)	0.0307 (18)	−0.0017 (15)	0.0057 (14)	0.0013 (16)
C6	0.0309 (18)	0.0213 (17)	0.0339 (19)	−0.0068 (14)	0.0055 (15)	−0.0012 (14)
C36	0.0274 (18)	0.034 (2)	0.040 (2)	−0.0056 (15)	0.0046 (15)	−0.0016 (16)
C25	0.0341 (19)	0.042 (2)	0.0278 (19)	0.0046 (16)	0.0088 (15)	0.0031 (17)
C35	0.0263 (18)	0.044 (2)	0.045 (2)	−0.0093 (17)	−0.0015 (16)	0.0039 (19)
C7	0.034 (2)	0.052 (2)	0.033 (2)	−0.0089 (18)	0.0145 (16)	−0.0053 (18)
C2	0.0327 (19)	0.0305 (19)	0.034 (2)	0.0044 (15)	−0.0007 (15)	0.0015 (16)
C24	0.036 (2)	0.036 (2)	0.054 (3)	−0.0064 (17)	0.0154 (18)	0.0106 (19)
C16	0.038 (2)	0.034 (2)	0.050 (2)	0.0086 (17)	0.0088 (18)	0.0113 (19)
C3	0.040 (2)	0.047 (2)	0.044 (2)	0.0149 (19)	0.0039 (18)	−0.009 (2)
C15	0.037 (2)	0.056 (3)	0.044 (2)	0.011 (2)	0.0034 (18)	0.024 (2)
C34	0.034 (2)	0.082 (3)	0.050 (3)	−0.011 (2)	0.0230 (19)	−0.001 (2)
C14	0.067 (3)	0.074 (3)	0.030 (2)	0.003 (3)	−0.003 (2)	−0.002 (2)
O1	0.088 (3)	0.072 (2)	0.0390 (17)	−0.0155 (19)	0.0133 (16)	0.0106 (16)
O2	0.141 (15)	0.087 (9)	0.041 (7)	0.065 (10)	0.020 (8)	−0.001 (6)
O3	0.093 (7)	0.060 (8)	0.066 (7)	−0.046 (6)	−0.006 (5)	0.026 (6)
O4	0.023 (5)	0.143 (13)	0.112 (11)	0.011 (6)	0.010 (5)	−0.008 (8)
O4'	0.098 (11)	0.158 (16)	0.066 (8)	−0.059 (10)	−0.012 (7)	0.035 (9)
O3'	0.23 (2)	0.041 (7)	0.106 (12)	0.035 (8)	0.036 (13)	−0.011 (6)
O2'	0.097 (9)	0.111 (14)	0.085 (12)	0.045 (9)	0.065 (9)	0.029 (8)