U11	U22	U33	U12	U13	U23
Cl1	0.0858 (9)	0.0865 (10)	0.1269 (11)	0.0090 (8)	−0.0179 (8)	0.0212 (9)
Cl2	0.1090 (11)	0.0865 (10)	0.1149 (10)	0.0230 (9)	0.0478 (8)	0.0115 (9)
O1	0.083 (2)	0.074 (2)	0.0473 (16)	−0.0306 (18)	−0.0006 (15)	−0.0049 (16)
N1	0.071 (2)	0.053 (2)	0.039 (2)	−0.007 (2)	−0.0005 (18)	−0.0096 (17)
N2	0.055 (2)	0.052 (2)	0.0420 (19)	−0.0023 (18)	0.0037 (16)	−0.0009 (17)
C11	0.049 (2)	0.053 (3)	0.034 (2)	0.003 (2)	−0.0035 (19)	−0.002 (2)
C9	0.061 (3)	0.048 (3)	0.041 (2)	−0.002 (2)	0.002 (2)	0.001 (2)
C12	0.053 (2)	0.050 (3)	0.043 (2)	−0.004 (2)	−0.001 (2)	0.005 (2)
C8	0.058 (2)	0.056 (3)	0.030 (2)	−0.005 (2)	−0.0010 (19)	−0.003 (2)
C10	0.058 (3)	0.055 (3)	0.037 (2)	−0.011 (2)	−0.002 (2)	−0.002 (2)
C6	0.058 (3)	0.061 (3)	0.031 (2)	−0.016 (2)	0.008 (2)	0.000 (2)
C13	0.057 (2)	0.061 (3)	0.046 (2)	−0.002 (2)	0.004 (2)	0.004 (2)
C1	0.063 (3)	0.061 (3)	0.042 (2)	−0.012 (2)	0.004 (2)	0.003 (2)
C5	0.059 (3)	0.067 (3)	0.051 (3)	−0.001 (2)	0.016 (2)	0.008 (2)
C7	0.082 (3)	0.066 (3)	0.046 (2)	−0.022 (3)	0.010 (2)	−0.004 (2)
C17	0.068 (3)	0.070 (3)	0.053 (3)	−0.016 (3)	0.014 (2)	−0.008 (3)
C14	0.055 (3)	0.076 (4)	0.066 (3)	0.007 (3)	0.016 (2)	0.015 (3)
C2	0.091 (3)	0.066 (3)	0.053 (3)	−0.008 (3)	0.014 (3)	−0.011 (3)
C15	0.066 (3)	0.071 (4)	0.073 (3)	−0.014 (3)	0.010 (3)	0.008 (3)
C4	0.069 (3)	0.114 (5)	0.053 (3)	−0.004 (3)	−0.009 (3)	0.011 (3)
C16	0.082 (3)	0.068 (3)	0.068 (3)	−0.019 (3)	0.012 (3)	−0.008 (3)
C3	0.098 (4)	0.117 (5)	0.043 (3)	−0.020 (4)	0.003 (3)	−0.006 (3)