Fig. 1.

Chemical structures and synthetic pathways to MO films. (A) Chemical structures of acetylacetone and 1,1,1-trifluoroacetylacetone. (B) Synthetic pathway for wet and dry MO-precursor powders. (C) Film-fabrication processes with the schematic evolution of MO-precursor coordination chemistry and film thickness. TFT structures and materials used are also shown. Combustion synthesis (CS), fuel-assisted CS (FA-CS), preannealed CS (P-CS), and preannealed FA-CS (P-FA-CS) processes are done by spin-coating. BC/CS, blade coating/combustion synthesis; BC/FA-CS, blade coating/fuel-assisted combustion synthesis; CBC, combustion blade coating.