Table 1.

Process window for obtaining homogeneous triangular 2D-LIPSS. Comparison between delay line setup and birefringent crystals (BCs) for CP pulses.

Setup	Delay	Overlap (pps)	Hatch (H)	Fluence (Φ)	Dose (ppstot)	Source
Delay line	|1 ps|≤ Δτ<|10 ps|	10	1 μm	0.1 J/cm2	250	[17]
BCs	1.5 ps, 3 ps	20	2 μm	0.1 J/cm2	240	Figure 2