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. 2019 Apr 20;19(8):1886. doi: 10.3390/s19081886

Figure 2.

Figure 2

Focused ion beam (FIB) and focused electron beam (FEB) drilling methods. (a) Schematic of the FIB drilling technique (reprinted with permission from [52], copyright 2001, Springer Nature). (b) A 2.5 nm diameter SiC nanopore fabricated using FIB drilling (reprinted with permission from [46], copyright 2007, Elsevier B.V.). (c) Schematic of the FEB drilling technology. An FEB from the TEM drilled a nanopore directly on a suspended graphene membrane. (d) A TEM image of a graphene nanopore ((c,d) are reprinted with permission from [56], copyright 2013, Springer Nature).