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. 2019 Apr 21;19(8):1895. doi: 10.3390/s19081895

Figure 4.

Figure 4

(a) Characterization setup for the piezoelectric MEMS devices; (b) microscope camera and DIP ZIF socket to anchor the DUT; (c) fabricated piezoelectric microgenerator bonded to a PCB and mounted on the shaker.