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. 2019 Apr 21;19(8):1895. doi: 10.3390/s19081895

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© 2019 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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(a) Proposed monolithic system, composed by the converter circuit, the load capacitors, and the piezoelectric MEMS structure for energy harvesting; (b) cross-section sketch of the fabrication process for the proposed monolithic system.