Table 1.
Coatings | Properties | 0 wt% | 0.3 wt% | 0.6 wt% |
---|---|---|---|---|
ESC | Thickness (μm) | 81 ± 4 | 82 ± 4 | 83 ± 4 |
Square resistance (MΩ) | 0 | 156.2 ± 5 | 2.6 ± 0.2 | |
Resistivity (Ω m) | 0 | 12,808.4 | 215.8 | |
BrC | Thickness (μm) | 82 ± 4 | 82 ± 4 | 83 ± 4 |
Square resistance (MΩ) | 0 | 0 | 155.7 ± 0.5 | |
Resistivity (Ω m) | 0 | 0 | 12,923.1 |