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The first four orders modes of the dual-mass sensing mode coupling MEMS gyroscope structure: (a) Drive in-phase mode (first mode) with frequency ωx1; (b) sensing in-phase mode (second mode) with frequency ωy1; (c) sensing anti-phase mode (third mode) with frequency ωy2; (d) Drive anti-phase mode (fourth mode) with frequency ωx2.
