Table 1.
MEMS gyroscope mechanical parameters under different temperatures (tested values).
| Temperature (°C) |
ωx1/2π (Hz) |
ωx2/2π (Hz) |
ωy2/2π (Hz) |
ωy1/2π (Hz) |
Qx 1 | Qx 2 | Qy 2 | Qy 1 |
|---|---|---|---|---|---|---|---|---|
| −40 | 2730.2 | 3494.7 | 3470.8 | 3367.2 | 2115 | 1773 | 1559 | 1415 |
| −30 | 2729.8 | 3494.2 | 3470.1 | 3366.3 | 2044 | 1707 | 1495 | 1349 |
| −20 | 2729.0 | 3493.1 | 3468.9 | 3365 | 1970 | 1626 | 1426 | 1272 |
| −10 | 2728.1 | 3492.1 | 3467.9 | 3363.9 | 1900 | 1553 | 1362 | 1202 |
| 0 | 2727.2 | 3491.5 | 3467.0 | 3363.1 | 1850 | 1502 | 1315 | 1152 |
| 10 | 2726.8 | 3490.1 | 3465.5 | 3361.5 | 1804 | 1454 | 1275 | 1107 |
| 20 | 2726.2 | 3488.9 | 3464.1 | 3360.1 | 1744 | 1395 | 1224 | 1051 |
| 30 | 2725.4 | 3488.4 | 3463.6 | 3359.5 | 1713 | 1367 | 1199 | 1024 |
| 40 | 2724.1 | 3487.5 | 3462.6 | 3358.5 | 1658 | 1315 | 1151 | 973 |
| 50 | 2722.9 | 3486.2 | 3461.3 | 3357 | 1635 | 1290 | 1130 | 950 |
| 60 | 2721.3 | 3485.7 | 3460.7 | 3356.3 | 1625 | 1278 | 1122 | 939 |