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SEM images of the Si master (a, e) and imprinted COC substrates (b-c and f-h) from different UV-resin molds replicated from the Si master: top-view images (a-d) and their cross-sectional profiles (e-h). The thermal NIL performance of a UV-resin mold was determined by measuring the cross-sectional profile of the imprinted nanochannel.
