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. 2019 May 28;10:2349. doi: 10.1038/s41467-019-10282-1

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — Silicon-on-insulator (SOI) waveguide thermal tuning. a Schematic top views of a tunable MRR without and with isolation trenches. Simulated static temperature distribution in the cross-section of a tunable MRR with constant heating power P on the heater above b without isolation trenches and c with isolation trenches. d Relation between effective index of the quasi-TE mode and temperature. e Relation between OPD, resolution of the tunable MZI, and heating power on MZI heater 2