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. 2019 May 4;19(9):2076. doi: 10.3390/s19092076

Table 1.

Gas sensors based on optical detection. λ: operating wavelength; l: optical path; MEMS: micro-electro-mechanical systems; FF: face-to-face; //: unreported; LED: light emitting diode; DFB: distributed feedback laser; QCL: quantum cascade laser; MCT: mercury cadmium telluride; WG: waveguide; C3H6O: acetone; NH3: ammonia; CO2: carbon dioxide; CH2O: formaldehyde; NO: nitric oxide; CO: carbon monoxide; CH4: methane; C2H4O2: methyl formate; CH3OH: methanol.

Emitter Detector λ
[μm]
l
[cm]
Gas Detected Detection Limit
[ppm]
Topology
(cell)
Power Consumption
[mW]
Ref.
MEMS Thermopile 8.26 10 C3H6O 50 FF //
heater 10.6 NH3 10 [63]
LED Photodiode 4.26 // CO2 // Planar 35
(dome) [47]
MEMS Bolometer 4.26 8 CO2 30 Planar 45
heater (open) [73]
LED Photodiode 0.34 19.5 CH2O 4.3 FF // [48]
LED Photodiode 0.226 50 NO 2 FF // [53]
DFB // 1.65 20 CH4 11 FF // [75]
MEMS Pyroelectric 4.65 39.3 CO 8.8 Planar //
heater 4.26 CO2 8.7 (open)
3.31 CH4 10.3 [64]
MEMS Thermopile 4.26 8 CO2 50 FF 350
heater [19]
// // 4.26 0.5 CO2 ∼400 FF // [58]
HeNe PbSe 3.4 0.15 CH4 // Cavity //
laser (∼25 μm) [56]
Lamp Pyroelectric 4.66 2.6 CO // Planar //
4.26 CO2 (dome)
3.33 CH4 [59]
MEMS Thermopile 4.26 7.5 CO2 // FF ∼80
heater [43]
AlInSb InSb 4.2 8 CO2 1000 Planar //
LED (open) [40]
MEMS Thermopile 4.26 7 CO2 // FF ∼50
heater [54]
LED Photodiode 1.66 12 CH4 100 FF //
(InGaAs) [76]
MEMS Pyroelectric 8.4 30 C2H4O2 165 FF //
heater 9.6 CH3OH 184 [77]
Laser PbTe 3.31 0.5 CH4 1000 WG // [60]
QCL MCT 4.23 1 CO2 5000 WG // [61]
DFB InGaAs 1.65 10 CH4 100 WG // [62]