Fig. 2.
(A) Frequency response of the ET MEMS fiber-optic scanner. Resonant frequency of the scanner was measured to ~100 Hz and a 3 mm beam scanning range was achieved with a drive voltage of only 3 VACp–p on top of a 1.5 VDC bias. The inset in (A) shows a photograph of the resonant beam scanning line in the focal plane. (B) Static displacement of the fiber cantilever tip with respect to the drive DC voltages. A relatively large actuation force of the ET bimorph actuator allows for a more than 1 mm fiber tip scanning range with a less than 2 VDC drive voltage.