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. Author manuscript; available in PMC: 2019 May 30.
Published in final edited form as: J Phys Chem B. 2017 Sep 14;121(38):8991–9005. doi: 10.1021/acs.jpcb.7b05885

Figure 9.

Figure 9.

Calculated partial charge of silicon P(Si), oxygen P(O), and nitrogen P(N) as a function of Si–O–N film refractive index. Also plotted in this figure are the experimentally determined O/Si ratio (x) and N/Si ratio (y) and the a:b peak area ratio based on XANES analysis of the silicon L-edge.