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Metasurface-enabled MEMS (a) Optical microscope image of a MEMS scanner with a flat lens on top. (b) Angular displacement of the MEMS scanner with and without the metasurface-based lens. (c) Simulation: distribution of the intensity of the reflected beam in the xz-plane at y = 0. The maximum intensity occurred when z = 5 mm and focusing efficiency is 83%. (Reproduced from [47] with permission.)
