Figure 2.

Schematic drawing of the 2D patterned Au-coated resonant micro-scanner and its electrical layout. (a) CAD drawing of the scanning micro-mirror inside the confocal microscope’s scan-head (OD: 5.0 mm). (b) Zoom-in view of the ray-tracing beam spots (changes due to axial scanning, 0–400 µm), effective area of the “dumbbell” shaped micro-mirror. (c) Schematic drawing of the device silicon/buried oxide/handle silicon layers (not to scale), in-plane comb-drive actuator fingers, Au coating, inner and outer torsion springs, electrical insulation trenches, gimbal frame, backside island, and electrical layout, not to scale Note: EIT, electrical insulation trench; TS, torsion spring. (d) Schematic drawing of the fixed and movable comb-drive actuator fingers, D: the distance (or gap) between the comb-drive actuator fingers, W: width, L: length. (e) Schematic drawing of the actuation using the in-plane comb-drive actuator fingers, θ: tilting angle, A(θ): overlapped area.