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Finite element analysis (FEA) simulation and modal analysis in ANSYS for the 2D parametrically-resonant MEMS scanner. (a) Outer (slow) tilting around the Y-axis (resonant frequency: ~1090 Hz); (b) inner (fast) tilting around the X-axis (resonant frequency: ~6250 Hz); (c–e) higher order resonant modes are designed to be far away from the basic tilting modes around the X- and Y-axes, 3rd~5th mode: ~11,230 Hz, ~13,830 Hz, ~13,870 Hz, respectively.
