Figure 6.

Characterization of the 2D Au-coated resonant MEMS scanner using a position sensing detector (PSD)-based measurement system setup. (a) Simple packaging of the MEMS device onto the PCB stage mounted on a 3D-printed polymer holder; (b) scanning pattern demonstration by clamping the holder on the 3D-printed polymer fixture; thin protected copper wires were used for delivering electricity to the MEMS scanner; (c) schematic drawing of the custom-made measurement system setup for fully characterizing the 2D resonant MEMS scanner; the PSD was located behind the 50:50 beam splitter; two silver-coated reflective mirrors held on kinetic stages were used to align the He-Ne laser beam accurately onto the surface of the scanning micro-mirror; the steered laser beam passed through the beam splitter and was detected by the PSD with fast responses.