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Structural features of the 2D resonant MEMS scanner. L, length; W, width; D, distance (gap); T, thickness.
| Chip Size (mm) | Comb-Drive Fingers (µm) | Torsion Springs (µm) | Gimbal Frame (mm) | Micro-Mirror (mm) | Backside Island (µm) | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Inner (8) | Outer (2) | ||||||||||||
| L | W | L | W | D | L | W | L | W | L | W | L | W | T |
| 3.2 | 2.9 | 100 | 5 | 5 | 100 | 5 | 175 | 10 | 3.04 | 1.36 | 2.9 | 0.68 | 50 |
