Table A1.

Simulation parameters.

Parameter	Value	Units
Young’s modulus of Si	130	$\mathrm{GPa}$
Poisson’s ratio of Si	0.27
Mass density of Si	2280	$\mathrm{kg}/{\mathrm{m}}^3$
Speed of sound in oil	1500	$\mathrm{m}/\mathrm{s}$
Mass density of oil	1000	$\mathrm{kg}/{\mathrm{m}}^3$
Young’s modulus of PMMA	3	$\mathrm{GPa}$
Mass density of PMMA	1185	$\mathrm{kg}/{\mathrm{m}}^3$
Damping coefficient	0.06	$\mathrm{N}·\mathrm{s}/\mathrm{m}$