Figure 10.
(a) Si fin covered with SiO2 (b) removal of Si in the fin after wet-etch by TMAH and (c) HCl vapor etch [61].
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.