Table 2.

The effective work function of different metals grown by ALD for NMOSFET.

Metal	Dep. Method	Effective Work Function	Ref.
TaCy	PEALD	4.77–4.54 eV	[84]
TaCN	PEALD	4.37 eV	[85]
TiC	PEALD	5.24 eV–4.45 eV	[86]
WC0.4	PEALD	4.2+/-0.1 eV	[87]
ErC2	ALD	3.9 eV	[88]
TiAlC	thermal ALD	4.79–4.49	[90]
TiAlC	thermal ALD	4.46–4.24	[91]
TaAlC	thermal ALD	4.74–4.49	[92]
TaAlC	thermal ALD	4.65–4.26	[93]