Table 1.

Sample treatment regarding deposition rates and substrates. Experiment 1 is an experiment on the morphology of Ag depending on the deposition rate, and Experiment 2 is an experiment on the morphology of Ag depending on the substrate. They are described in Section 3.1 and Section 3.2 respectively.

Experiment Series	Deposition Rate (Å/s)	Substrate
Experiment 1	1.0	Si/SiO2
	1.7	Si/SiO2
	2.4	Si/SiO2
	3.1	Si/SiO2
Experiment 2	2.4	Sapphire
	2.4	Si/SiO2/W
	2.4	Si/SiO2/G
	2.4	P-Si/SiO2