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. 2019 Jun 26;8:59. doi: 10.1038/s41377-019-0167-5

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a A cross-sectional view of the miniaturized confocal microscope with a new objective lens that incorporates a MEMS 3D scanner. b An illustration of the light path through the annular aperture and the beam scan of the MEMS device. c A model of the MEMS 3D scanner. A gimbal platform is bonded to a set of quadrant electrodes