Table 1.
Mechanical performance of the MEMS 3D scanner
| Fast-axis resonant mechanical scan angle | ± 3° |
| Fast-axis resonant frequency | 1000 Hz |
| Slow-axis resonant frequency | ~ 200 Hz |
| Slow-axis 1 Hz mechanical scan angle. | ± 1.8° |
| Maximum mirror sag. | 9.1 µm |
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