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Samples after optical lithography and etching. (a) Scheme of side view of a single membrane. The sketch is not to scale as the SixNy windows and the Si wafer have a thickness of 120 nm and 200 µm, respectively. SEM images of the (b) top and (c) bottom surface reveal the 3 × 3 array of SixNy membranes and the pyramid-shaped trenches caused by anisotropic wet-etching of Si.
