Table 2. Crystal stage resolutions on the different axes.
rx, ry and rz represent angular motions around the x, y and z axes, respectively.
| Crystal(s) | Axis | Resolution |
|---|---|---|
| BS, BR | x, y, z | 1 nm |
| BS, BR, CH1, CH2 | rx, rz | 0.03 µrad |
| BS | r y | 0.03 µrad |
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