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The variation of the error (the disparity between MRSFs and commercial flow sensor, z-axis) with the flow velocity (0.2 m/s −2 m/s, x-axis) and temperature change (ΔT, ºC, y-axis). (a) Single-film MRSF with low TCR (α = 0.001), (b) single-film MRSF with high TCR (α = 0.002), (c) double-film MRSF with low TCR (α = 0.001), and (d) double-film MRSF with high TCR (α = 0.002).
