Skip to main content
. Author manuscript; available in PMC: 2019 Jul 12.
Published in final edited form as: Proc IEEE Sens. 2018 Dec 27;2018:10.1109/ICSENS.2018.8589733. doi: 10.1109/ICSENS.2018.8589733

Fig. 1.

Fig. 1.

A schematic representation of the design of a single cell in the piezoelectric micromachined ultrasound transducer (PMUT) array and various material layers in suspended membrane.