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SEM images of the SERS substrates at different fabrication stages. (a) Silicon nanopillars fabricated after lithography and etching; (b) nanopillars after silica deposition; (c) nanopillars after gold deposition. Images in panels (d–f) are taken at a 45° angle and are enlarged with respect to images in panels (a–c), respectively. Reproduced with permission from Kanipe et al. [355]. Copyright (2016), the American Chemical Society.
