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Microfluidic devices with silicon 3D electrodes. (A) Schematic of the device with silicon electrode pillars of a uniform height. Reproduced with permission from [82], © 2008 Elsevier. (B) Schematic of the device with silicon electrode pillars of a non-uniform height. Reproduced with permission from [83], © 2009 AIP Publishing. (C) Schematic of the device with symmetrical silicon electrodes [84]. (D) Schematic of the device with bulk silicon electrode [85].
