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. 2019 Jul 16;9:10287. doi: 10.1038/s41598-019-46691-x

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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(A) Optical microscopy images (exported from ARYA) from the three cantilevers with different aperture sizes. (B) The same cantilevers with the laser spot positioned directly over the first pair of pillars (indicated by red arrows), which is used as the reference (0) position in all of the experiments. (C) Illustration of this assigned reference position with the geometrical parameters of the cantilevers (d: aperture size, x cap size). Different aperture sizes require different cap sizes, as indicated in the label. The center of aperture opening is always located 192 μm from the base of the cantilever.