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. 2019 Jul 16;9:10287. doi: 10.1038/s41598-019-46691-x

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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The obtained InvOLS values measured in 10 µm steps on polystyrene and silicon substrates as functions of the laser position for FluidFM cantilevers with (A) 2 µm, (B) 4 µm, and (C) 8 µm apertures. The data points represent the average and standard deviation of 10 consecutive measurements in every point. The dashed lines indicate the average value for a given cantilever considering all data.