. 2017 Mar 20;2(3):1040–1046. doi: 10.1021/acsomega.7b00042

Table 2. Average Surface Roughness of the VO₂ Films As Estimated from AFM Analysis^a.

sample	A	B	C	D
thickness (nm)	177	65.5	124.6	72.2
average RMS (nm)	22	11	14	11

Films were deposited as indicated in Table 1, with film thicknesses as estimated from ellipsometry measurements.

Table 2. Average Surface Roughness of the VO2 Films As Estimated from AFM Analysisa.