Table 3.

Nanostructures fabrication techniques.

Method	Substrates applicable	Surface textures fabricated	Comments
Plasma etching	Silicon, glass, polymer, metals	Micro/nano pillars, nano wires, nano grass	Wafer scale large area fabrication possible, complex instrumentation, high cost
Nanoimprint lithography	Silicon, glass, polymer, metals	Micro/nano pillars, nano ridge	Feasibility of large scale fabrication depending on size of nanoimprint mold (fabrication area a few cm2), multi-step process, precision required for coating thermoplastic polymer, maintaining temperature and applied pressure, low cost
Laser interference lithography	Silicon, glass, polymer, metals	Nano ridges, nano pillars	Feasibility of large scale fabrication depending on power of laser and spot size of laser mold (fabrication area ~ cm2), complex setup, sensitive to white light exposure, vibration, high cost of laser source
Anodization	Metals	Nano spikes	Large area fabrication possible (fabrication area ~ cm2), simple process, low cost
Hydrothermal synthesis	Silicon, glass, polymer, metals	Nano rods, nano wires, nano needles	Large area fabrication possible (fabrication area in cm2), simple process, low cost