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. Author manuscript; available in PMC: 2019 Nov 5.
Published in final edited form as: Methods Cell Biol. 2018 Nov 5;148:35–50. doi: 10.1016/bs.mcb.2018.09.010

Figure 2. Fabrication procedure of the microfluidic single-cell trapping array.

Figure 2.

(A) Fabricate the master mold by two-layer photolithography. The 1st layer (gap channels) is patterned using SU-8 2005. Thereafter SU-8 2010 is spin-coated on-top-of the 1st layer, and the alignment markers on the 2nd-layer mask and the 1st-layer patterns are aligned. After a 2nd time exposure and development, a double-layer SU-8 mold is patterned on the wafer. (B) Fabricate the PDMS slab with embedded trapping array patterns by casting the mold using soft-lithography, then punch the connection holes at the inlet and the outlet, and thereafter make a complete device by sealing the PDMS slab with a glass substrate using oxygen plasma bonding and connecting the Tygon tubing at the inlet.