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. 2019 Jan 16;4(1):1401–1409. doi: 10.1021/acsomega.8b03164

Figure 1.

Figure 1

(a) Schematic illustration of a DLW-TPP system (Nanoscribe), oil immersion mode. Femtosecond laser pulse source: 780 nm, 80 MHz, 100 fs. Peak power: ∼25 kW. Highest fluence level: ∼1 J/cm2. Inset picture: XYZ-3D movable sample stage. (b) Schematic graph of the DLW process. Hollow 3D microstructures were sketched by a CAD program. Under femtosecond laser pulse irradiation, photoresist polymers are cross-linked to form solidified hollow 3D microstructure devices. In this work, the size of opening ranges from 500 nm to 6 μm.