Skip to main content
. 2019 Jul 9;19(13):3025. doi: 10.3390/s19133025

Table 1.

The detailed parameter of the prepared SAW resonators.

Parameters Value
Acoustic wavelength (μm) 1.5–3.0
Strip width (μm) 2
Aperture (μm) 800
Strip numbers in IDT 101
Strip numbers in reflectors 400
Thickness of electrodes 100 nm/10 nm (Au/Ti)
Substrate material LGS (La3Ga5SiO14)