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The detailed parameter of the prepared SAW resonators.
| Parameters | Value |
|---|---|
| Acoustic wavelength (μm) | 1.5–3.0 |
| Strip width (μm) | 2 |
| Aperture (μm) | 800 |
| Strip numbers in IDT | 101 |
| Strip numbers in reflectors | 400 |
| Thickness of electrodes | 100 nm/10 nm (Au/Ti) |
| Substrate material | LGS (La3Ga5SiO14) |
