Table 2.
Sample Number | Zn | Fe | ||||
---|---|---|---|---|---|---|
Sputtering Method | Power (W) | Composition (at%) | Sputtering Method | Current (A) | Composition (at%) | |
I | RF | 100 | 100 | DC | 0 | 0 |
II | 96.5 | 0.02 | 3.5 | |||
III | 41 | 0.05 | 59 | |||
IV | 29.9 | 0.08 | 70.1 | |||
V | 24.5 | 0.1 | 75.5 |
Sample Number | Zn | Fe | ||||
---|---|---|---|---|---|---|
Sputtering Method | Power (W) | Composition (at%) | Sputtering Method | Current (A) | Composition (at%) | |
I | RF | 100 | 100 | DC | 0 | 0 |
II | 96.5 | 0.02 | 3.5 | |||
III | 41 | 0.05 | 59 | |||
IV | 29.9 | 0.08 | 70.1 | |||
V | 24.5 | 0.1 | 75.5 |