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. 2019 Jul 9;19(13):3025. doi: 10.3390/s19133025

Table 2.

The composition of ZnxFeyO films obtained by EDX.

Sample Number Zn Fe
Sputtering Method Power (W) Composition (at%) Sputtering Method Current (A) Composition (at%)
I RF 100 100 DC 0 0
II 96.5 0.02 3.5
III 41 0.05 59
IV 29.9 0.08 70.1
V 24.5 0.1 75.5